Correction of artefacts associated with large area EBSD

نویسندگان

چکیده

There is an increasing requirement for the acquisition of large two (2D) or three (3D) dimensional electron back scattered diffraction (EBSD) maps. It a well-known, but largely neglected fact, that EBSD maps may contain distortions. These include long-range distortions, which can be caused by interaction beam with sample geometry and it also arise from drift. In addition there are shorter range artefacts arising topographical features, such as curtaining. The geometrical distortions minimised careful SEM calibrations alignment. However, become increasingly prevalent when acquiring area 2D take long time to acquire thus especially prone evident in serial section tomography (SST) stacked on top one another produce 3D Here we quantify these data referencing them secondary (SE) images 3D-EBSD acquired WCCo hardmetal. Long-range (due drift) equating around 10μm across 200μm x 175 μm map, short-range effects) 3 over distance 40 µm were observed. Methods correcting then proposed. This study illustrates benefits necessity corrections if morphological features properly interpreted collecting datasets, example mechanical sectioning, block face ultramicrotomy, laser FIB-SEM tomography, PFIB spin milling, etc.

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ژورنال

عنوان ژورنال: Ultramicroscopy

سال: 2021

ISSN: ['0304-3991', '1879-2723']

DOI: https://doi.org/10.1016/j.ultramic.2021.113315